Technics Hummer V Sputter Coater: Difference between revisions
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* Power cord is scary and needs to be replaced. | * Power cord is scary and needs to be replaced. | ||
* Gas flow rate meter has a small leak, needs a new gasket. | * Gas flow rate meter has a small leak, needs a new gasket. | ||
* Changing the vacuum oil would be a good idea. | |||
* Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed. | * Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed. | ||
