Technics Hummer V Sputter Coater

Technics Hummer V Sputter Coater

Owner/Loaner	PS:One
Serial Number	HUV 62735
Make/Model	Hummer V
Arrival Date	3/23/2013
Usability	NO
Contact	Ryan Pierce
Where	Across from Woodshop
Authorization Needed	yes
Hackable	NO
Estimated Value	$5,000.00
Host Area	{{{hostarea}}}

Configuration

• Standard sputter coater
• Carbon arc attachment for carbon deposition

Status

• Requires argon for operation. Preferably high purity argon.
• Power cord is scary and needs to be replaced.
• Gas flow rate meter has a small leak, needs a new gasket.
• Changing the vacuum oil would be a good idea.
• Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed.

List of Currently Certified Users

Qualified Member	Trained By
Ryan Pierce	Ryan Pierce
Steve Finkelman	Steve Finkelman

Documentation

Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.

The manufacturer was purchased by Anatech USA and they still support this product.

Maintenance Log

Date	Maintainer	Description
7/21/2013	Ryan Pierce	Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell.
4/?/2013	Steve Finkelman	Full cleaning of chamber.