Leica S430 Scanning Electron Microscope: Difference between revisions
From Pumping Station One
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* While the chamber air admit solenoid may be a possible culprit, this seems unlikely. Air leaks usually are larger than this. Still, plugging the solenoid is an easy way to check. | * While the chamber air admit solenoid may be a possible culprit, this seems unlikely. Air leaks usually are larger than this. Still, plugging the solenoid is an easy way to check. | ||
* The turbomolecular pump is now a likely suspect. 1e-4 torr is only marginally better than a roughing pump can achieve. Turbopumps should drop the pressure into the e-6 range. It is possible the pump is not running at full speed. This should be investigated via the pump controller. | * The turbomolecular pump is now a likely suspect. 1e-4 torr is only marginally better than a roughing pump can achieve. Turbopumps should drop the pressure into the e-6 range. It is possible the pump is not running at full speed. This should be investigated via the pump controller. | ||
* Applying light finger pressure to the air admit solenoid causes the chamber pressure to drop from 9.3e-5 torr to as much as 9.0e-5 torr; releasing it causes it to return to the starting value. This is repeatable. It suggests a possible leak related to the air admit solenoid. | |||
=== Image Processor board loses communications === | === Image Processor board loses communications === | ||