Technics Hummer V Sputter Coater: Difference between revisions
From Pumping Station One
| Line 46: | Line 46: | ||
|11/9/2013 | |11/9/2013 | ||
|Ryan Pierce | |Ryan Pierce | ||
|Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow | |Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow meter, but it still has a leak as tested by Ryan. Also put panels back on. | ||
|- | |- | ||
| | |1?/?/2013 | ||
|Ryan Pierce | |Ryan Pierce | ||
|Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.) | |Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.) | ||
